In a breakthrough set to revolutionize the semiconductor industry, engineers have developed the world's first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This ...

A diffractive optic creates two DUV beams, which are focused and interfered on a sample surface (diamond) using a 4f imaging system to generate a microscopic sinusoidal excitation profile.

Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...

Deep ultraviolet (DUV) laser generation has emerged as a critical field due to its utility in a diverse range of applications including high-precision lithography, spectroscopy and ultrafast science.

In a breakthrough set to revolutionize the semiconductor industry, the School of Engineering of Hong Kong University of Science and Technology (HKUST) has developed the first-of-its-kind ...